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사업개요

빨강차

■사업 개요
- Photo : Spin Chuck,유량계(CCPM급),N2 BLOWING COVER
- Etch : Nozzle Guide, AL TUNNEL 수리,PIVOT ARM RIGHT,LEFT
- Wet station
- CVD : Novellus conceptⅡ 용 ESC Chuck OEM 공급
- CMP : SpeedFam장비용 부품 2’nd vendor sourcing
- Diffusion
- Implanter
■Utility
◎ Hook-up
- Gas Line
- 열 배기 Line
- Vacuum Line
- Chemical Line
- (PFA 용착기 보유)
- SUN PATCH(LEAK작업)
■Utility
◎ 부품공급
- Valve(air)
- Bellows (부식방지용 PTAE 코팅가능)
- Flexible Line(부식방지용 W,PD,NI코팅가능)
- PVDF/PFA/PTFE Fitting Material
- Chemical Pump(Bellows)
- Vacuum Line Fitting류