| 20 | SUS | NC200428-110020 | 520*280*Ø100 |  |
Separation-type TRAP for PM |
| 19 | AL | NC200428-110019 | |  |
For heating block heat loss prev |
| 18 | AL | NC200428-110018 | Ø55 |  |
COOLING BLOCK |
| 17 | AL | NC200428-110017 | |  |
Equipment connection processing |
| 16 | SUS | NC200428 -110016 | |  |
Other Structuring Part HOUSING_I |
| 15 | PEEK | NC200428 -110015 | 43*32*18 |  |
Ebare spin chuck fixing bracket |
| 14 | PEEK | NC200428 -110014 | 90*78*12 |  |
Mirra spin chuck fixing bracket |
| 13 | Black acetal | NC200428 -110013 | 48*31*42 |  |
Bushing to fix down the Sorce Ho |
| 12 | Black acetal | NC200428 -110012 | 55*30*32 |  |
Bushing to fix down the Sorce He |
| 11 | Black acetal | NC200428 -110011 | 142*539*34 |  |
Power connector |
| 10 | SUS | NC200428 -110010 | 320*250*20 |  |
Wafer up-do used in Tungsten vap |
| 9 | SUS | NC200428 -110009 | 320*260*20 |  |
Wafer up-down used in Ti/Tin vap |
| 8 | SUS | NC200428 -110008 | Custom Order |  |
For FLANGE_TEL equipment PM |
| 7 | SUS | NC200428 -110007 | Custom Order |  |
Diffusion Flange UPPER FLANGE_L |
| 6 | SUS | NC200428 -110006 | Ø78*5.8T |  |
Shaft elasticity CA in the cente |
| 5 | SUS | NC200428 -110005 | 320*250*75 |  |
Wafer up-down lif used in AL vap |
| 4 | SUS | NC200428 -110004 | 250*250*140 |  |
Holds the wafer during the wafer |
| 3 | Teflon | NC200428 -110003 | Ø350 |  |
Leak prevention Te that is inser |
| 2 | HASTELLOY | NC200428-110002 | |  |
For turntable PM |
| 1 | AL | NC200428-110001 | Ø 256.78 |  |
TURBO PUMP COVER |